Publications

Design and simulation of micro energy harvester using MEMS (Microelectromechanical Systems) technology are presented. It is used to produce energy from ambient vibration to drive a low power microsensor. The design of a multilayered (Ti/PZT/Ti/SiO2 /Si) microcantilever is carried out using the PiezoMUMPs (the multi-user MEMS Process for piezoelectric devices) process. A standard microcantilever with a proof mass is used in the study. The natural frequency of the microcantilever is tuned for a low frequency (~126 Hz) at which gives a higher response. The tuned resonance frequency of the microcantilever needs to match with a source frequency to get enhanced energy efficiency. Hence, the design simulation of micro energy harvester is presented under applied 1 g magnitude acceleration. The maximum power transfer of the current design is observed 2.5 µW for the 100 kΩ resistive load.