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Characteristics of Mg doped TiO<inf>2</inf> thin film based deep UV photodetector
Journal
Vacuum
ISSN
0042207X
Date Issued
2022-07-01
Author(s)
Dalal, Avijit
Mishra, Madhuri
Chakrabarti, Subhananda
Gupta, Rajeev Kumar
Mondal, Aniruddha
Abstract
Co-doping of Mg into chemically stable TiO2 thin film is attractive for deep UV detection. In this report, we have fabricated ∼110 nm undoped TiO2 thin film and Mg doped TiO2 thin film based photodetectors on p-type Silicone substrates. The Mg doped TiO2 thin film shows good hydrophobicity. The undoped TiO2 thin film shows low deep UV besides high responsivity in the visible region. The Mg:TiO2 photodetector shows a maximum of four times superior light sensitivity as compared to undoped TiO2 thin film at 200 nm illumination. The Mg:TiO2 thin film shows the countable temporal response at 290 nm but the detector possesses low responsivity in the visible region.
Volume
201
Subjects