Design of Piezoelectric Aluminum Nitride MEMS Resonator

Journal
WORLD CONGRESS ON ENGINEERING AND COMPUTER SCIENCE, WCECS 2011, VOL I
Date Issued
2011
Author(s)
Patni, R
Indian Institute of Technology Jodhpur
Joshi, M
Mehra, S
Mohan, A
Abstract
The following work reports the design, numerical, analytical and simulation characterization of an Aluminum Nitride MEMS resonator. The paper offers a comparison of rectangular plate MEMS resonator (length extensional and width extensional mode shapes) and ring shape MEMS resonator. It also demonstrates the contour Eigen modes of resonators and their equivalent electric circuit model (BVD). Furthermore, an overview of a band pass filter that can be enabled by mechanical coupling of these counter mode resonators is briefly presented.
Subjects